JPH0363928U - - Google Patents
Info
- Publication number
- JPH0363928U JPH0363928U JP12635789U JP12635789U JPH0363928U JP H0363928 U JPH0363928 U JP H0363928U JP 12635789 U JP12635789 U JP 12635789U JP 12635789 U JP12635789 U JP 12635789U JP H0363928 U JPH0363928 U JP H0363928U
- Authority
- JP
- Japan
- Prior art keywords
- hole
- sealed space
- mask
- exposure
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12635789U JPH0363928U (en]) | 1989-10-26 | 1989-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12635789U JPH0363928U (en]) | 1989-10-26 | 1989-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0363928U true JPH0363928U (en]) | 1991-06-21 |
Family
ID=31674171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12635789U Pending JPH0363928U (en]) | 1989-10-26 | 1989-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0363928U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010040831A (ja) * | 2008-08-06 | 2010-02-18 | Orc Mfg Co Ltd | 露光装置における基板の露光方法 |
-
1989
- 1989-10-26 JP JP12635789U patent/JPH0363928U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010040831A (ja) * | 2008-08-06 | 2010-02-18 | Orc Mfg Co Ltd | 露光装置における基板の露光方法 |